JPS6145380B2 - - Google Patents

Info

Publication number
JPS6145380B2
JPS6145380B2 JP55166545A JP16654580A JPS6145380B2 JP S6145380 B2 JPS6145380 B2 JP S6145380B2 JP 55166545 A JP55166545 A JP 55166545A JP 16654580 A JP16654580 A JP 16654580A JP S6145380 B2 JPS6145380 B2 JP S6145380B2
Authority
JP
Japan
Prior art keywords
guide groove
holder
wafer
vertical movement
straight line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55166545A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5790956A (en
Inventor
Minoru Soraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55166545A priority Critical patent/JPS5790956A/ja
Priority to US06/324,121 priority patent/US4453757A/en
Publication of JPS5790956A publication Critical patent/JPS5790956A/ja
Publication of JPS6145380B2 publication Critical patent/JPS6145380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/02—Gripping heads and other end effectors servo-actuated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Robotics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP55166545A 1980-11-28 1980-11-28 Gripper for wafer Granted JPS5790956A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP55166545A JPS5790956A (en) 1980-11-28 1980-11-28 Gripper for wafer
US06/324,121 US4453757A (en) 1980-11-28 1981-11-23 Wafer gripping device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55166545A JPS5790956A (en) 1980-11-28 1980-11-28 Gripper for wafer

Publications (2)

Publication Number Publication Date
JPS5790956A JPS5790956A (en) 1982-06-05
JPS6145380B2 true JPS6145380B2 (en]) 1986-10-07

Family

ID=15833252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55166545A Granted JPS5790956A (en) 1980-11-28 1980-11-28 Gripper for wafer

Country Status (2)

Country Link
US (1) US4453757A (en])
JP (1) JPS5790956A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0185261U (en]) * 1987-11-26 1989-06-06

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60242996A (ja) * 1984-05-18 1985-12-02 松下電器産業株式会社 無塵把持装置
US4586743A (en) * 1984-09-24 1986-05-06 Intelledex Incorporated Robotic gripper for disk-shaped objects
JPS61241089A (ja) * 1985-04-16 1986-10-27 キヤノン株式会社 把持装置
JPH079927B2 (ja) * 1985-09-26 1995-02-01 株式会社東芝 半導体ウェハ−の着脱機構
DE3624307C1 (de) * 1986-07-18 1987-11-12 Agfa Gevaert Ag Vorrichtung zum Aufnehmen und Absetzen von Spulen
US5000652A (en) * 1986-09-22 1991-03-19 International Business Machines Corporation Wafer transfer apparatus
JPS6384041A (ja) * 1986-09-22 1988-04-14 インタ−ナショナル・ビジネス・マシ−ンズ・コ−ポレ−ション ウエハ移送装置
KR900006017B1 (ko) * 1987-12-18 1990-08-20 한국전기통신공사 가변직경형 웨이퍼운송장치
EP0405301B1 (en) * 1989-06-29 1995-08-30 Applied Materials, Inc. Apparatus for handling semiconductor wafers
US5184723A (en) * 1991-05-14 1993-02-09 Fluoroware, Inc. Single wafer robotic package
AT640U1 (de) * 1993-10-22 1996-02-26 Sez Semiconduct Equip Zubehoer Greifer für halbleiterwafer und andere scheibenförmige gegenstände
AT405701B (de) * 1997-06-18 1999-11-25 Sez Semiconduct Equip Zubehoer Greifer für halbleiterwafer und andere scheibenförmige gegenstände
DE19755694C2 (de) * 1997-12-16 2000-05-31 Sez Semiconduct Equip Zubehoer Handhabungsvorrichtung für dünne, scheibenförmige Gegenstände
US6578893B2 (en) * 2000-10-02 2003-06-17 Ajs Automation, Inc. Apparatus and methods for handling semiconductor wafers
US6988879B2 (en) * 2002-10-18 2006-01-24 Asm Technology Singapore Pte Ltd Apparatus and method for reducing substrate warpage
US9691651B2 (en) * 2005-01-28 2017-06-27 Brooks Automation, Inc. Substrate handling system for aligning and orienting substrates during a transfer operation
US7562923B2 (en) * 2004-02-09 2009-07-21 Mirae Corporation Tray transferring apparatus with gripper mechanism
WO2007047163A2 (en) * 2005-10-04 2007-04-26 Applied Materials, Inc. Methods and apparatus for drying a substrate
JP4746003B2 (ja) * 2007-05-07 2011-08-10 リンテック株式会社 移載装置及び移載方法
EP2590209A1 (en) * 2011-11-01 2013-05-08 Gintech Energy Corporation Gripper
US8322766B1 (en) 2011-11-02 2012-12-04 Gintech Energy Corporation Wafer gripper
JP6028683B2 (ja) * 2013-06-18 2016-11-16 三菱電機株式会社 把持装置
TWI791561B (zh) * 2017-07-21 2023-02-11 美商伊雷克托科學工業股份有限公司 非接觸式處置器及使用非接觸式處置器處置工件之方法
US10099384B1 (en) 2017-09-30 2018-10-16 Quartet Medtronics Inc Industrial wedge-type gripper mechanism
CN108766918B (zh) * 2018-07-27 2024-11-15 广东阿达半导体设备股份有限公司 焊线机拉料夹爪机构
CN112692754A (zh) * 2020-12-17 2021-04-23 萍乡市恩硕科技有限公司 一种电脑主板加工用固定装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US167127A (en) * 1875-08-24 Improvement in clamps
US351871A (en) * 1886-11-02 Michael j
JPS5441075A (en) * 1977-09-07 1979-03-31 Nippon Telegr & Teleph Corp <Ntt> Conveying device between atmospheric pressure and vacuum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0185261U (en]) * 1987-11-26 1989-06-06

Also Published As

Publication number Publication date
JPS5790956A (en) 1982-06-05
US4453757A (en) 1984-06-12

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